The present invention provides a control system for a modular high repetition
rate two discharge chamber ultraviolet gas discharge laser. In preferred embodiments,
the laser is a production line machine with a master oscillator producing a very
narrow band seed beam which is amplified in the second discharge chamber.
Novel control features specially adapted for a two-chamber gas discharge laser
system include: (1) pulse energy controls, with nanosecond timing precision (2)
precision pulse to pulse wavelength controls with high speed and extreme speed
wavelength tuning (3) fast response gas temperature control and (4) F2
injection controls with novel learning algorithm.