A memory device includes a semiconductor substrate, a first gate insulator on
a
first portion of a semiconductor substrate, a storage node on the first gate insulator,
a tunnel junction barrier on the storage node and a data electrode on the layer
tunnel junction barrier. The device further includes a second gate insulator layer
on a sidewall of the tunnel junction barrier, a third gate insulator on a second
portion of the substrate adjacent the tunnel junction barrier and a gate electrode
on the second gate insulator and the third gate insulator. First and second impurity-doped
regions are disposed in the substrate and are coupled by a channel through the
first and second portions of the substrate. Fabrication of such a device is also describes.