A force scanning probe microscope (FSPM) and associated method of making force
measurements on a sample includes a piezoelectric scanner having a surface that
supports the sample so as to move the sample in three orthogonal directions. The
FSPM also includes a displacement sensor that measures movement of the sample in
a direction orthogonal to the surface and generates a corresponding position signal
so as to provide closed loop position feedback. In addition, a probe is fixed relative
to the piezoelectric scanner, while a deflection detection apparatus is employed
to sense a deflection of the probe. The FSPM also includes a controller that generates
a scanner drive signal based on the position signal, and is adapted to operate
according to a user-defined input that can change a force curve measurement parameter
during data acquisition.