An ink jet recording head and a process for producing the same, and an ink jet recording apparatus are provided that improve the printing performance and also improve the production efficiency. A conjugated body 73 formed by conjugating silicon wafers 50 and 58 is cut, whereby nozzles 22 are opened, and cutting into head chip units is carried out. At this time, deep grooves 84 are formed on the surface of the silicon wafer 58 by anisotropic etching, and they are penetrated by etching on the opposite side. Grooves 90 are formed on the silicon wafer 50 by using the thus penetrated deep grooves 84 as a mask.