Carbon nanotubes are formed on projections on a substrate. A metal, such
as nickel is deposited on the substrate with optional platforms, and
heated to form the projections. Carbon nanotubes are formed from the
projections by heating in an ethylene, methane or CO atmosphere. A heat
sensor is also formed proximate the carbon nanotubes. When exposed to IR
radiation, the heat sensor detects changes in temperature representative
of the IR radiation. In a gas sensor, a thermally isolated area, such as
a pixel is formed on a substrate with an integrated heater. A pair of
conductors each have a portion adjacent a portion of the other conductor
with projections formed on the adjacent portions of the conductors.
Multiple carbon nanotubes are formed between the conductors from one
projection to another. IV characteristics of the nanotubes are measured
between the conductors in the presence of a gas to be detected.