An architecture for creating multiple operating voltage MOSFETs.
Generally, an integrated circuit structure includes a semiconductor area
with a major surface formed along a plane and first and second
spaced-apart doped regions formed in the surface. A third doped region
forming a channel of different conductivity type than the first region is
positioned over the first region. A fourth doped region of a different
conductivity and forming a channel is positioned over the second region.
The process of creating the gate structure for each of the two
transistors allows for the formation of oxide layers of different
thickness between the two transistors. The transistors are therefore
capable of operating at different operating voltages (including different
threshold voltages). Each transistor further includes fifth and sixth
layers positioned respectively over the third and fourth regions and
having an opposite conductivity type with respect to the third and fourth
regions.In an associated method of manufacturing the semiconductor
device, a first and second source/drain regions are formed in a
semiconductor layer. A first field-effect transistor gate region,
including a channel and a gate electrode is formed over the first source
drain region and a second field-effect transistor gate region is formed
over the second source/drain region. Fifth and sixth source/drain regions
are then formed for each of the first and second field-effect transistors
and further having the appropriate conductivity type. Variable thickness
gate oxides are created by appropriately masking, etching, and regrowing
gate oxides. As a result, the formed transistors operate at different
operating voltages. Thus a plurality of such transistors operating at
different operating voltage (as a function of the gate oxide thickness)
can be formed in an integrated circuit.