A micro-electromechanical system (MEMS) switch formed on a substrate, the
switch comprising a transmission line formed on the substrate, a
substrate electrostatic plate formed on the substrate, and an actuating
portion. The actuating portion comprises a cantilever anchor formed on
the substrate and a cantilevered actuator arm extending from the
cantilever anchor. Attraction of the actuator arm toward the substrate
brings an electrical contact into engagement with the portions of the
transmission line separated by a gap, thus bridging the transmission line
gap and closing the circuit. In order to maximize electrical isolation
between the transmission line and the electrical contact in an OFF-state
while maintaining a low actuation voltage, the actuator arm is bent such
that the minimum separation distance between the transmission line and
the electrical contact is equal to or greater than the maximum separation
distance between the substrate electrostatic plate and arm electrostatic
plate.