A composition for chemical-mechanical polishing, comprising an aqueous
solution and an abrasive that comprises polymer particles, is described.
The polymer particles carry an electrical charge, such that nearby
particles repel one another. Accordingly, aggregation of polymer
particles may be reduced, minimized or eliminated. The composition may
additionally comprise an oxidizing agent. A method of using the
composition to polish a substrate surface, such as a substrate surface
having a metal surface feature or layer, is also described. A substrate
so polished may exhibit good surface characteristics, such as a
relatively smooth surface or a reduced number of, or a lack of,
microscratches on the surface of the substrate.