The invention provides a polishing pad substrate comprising a copolymer,
wherein the copolymer has at least one hydrophilic repeat unit and at
least one hydrophobic repeat unit. The invention also provides a
polishing pad substrate comprising a polymer, wherein the polymer is a
modified polymer having at least one hydrophilic unit and at least one
hydrophobic unit attached to the polymer chain. The invention further
provides a method of polishing a workpiece comprising (i) providing a
workpiece to be polished, (ii) contacting the workpiece with a
chemical-mechanical polishing system comprising the polishing pad
substrate of the invention, and (iii) abrading at least a portion of the
surface of the workpiece with the polishing system to polish the
workpiece.