Method and apparatus for abating F.sub.2 from byproducts generated during cleaning of a processing chamber. F.sub.2 abatement is efficiently performed by directly injecting H.sub.2 in line with a foreline exiting the processing chamber. A tube which is highly resistant to oxidation and corrosive gases, even at high temperature, is connected in line with the foreline as part of the exhaust line of the processing chamber. A cooling jacket may be provided for cooling the tube, since the reaction between F.sub.2 and H.sub.2 is exothermic. A pressure monitoring arrangement may also be employed to insure that pressure within a hydrogen line, that feeds the injection of H.sub.2 into the tube, does not exceed a predetermined pressure value.