An electron microscope is offered which can analyze the three-dimensional
structure of a specimen without sectioning it by making use of
computerized tomography. The microscope has solved the problems intrinsic
to the microscope and permits application of computerized tomography to
general cases. A series of transmission images is obtained by tilting the
specimen by plural angles. Two-dimensional correlation processing is
performed between each of the series of images and a reference image. The
same field of view is selected and extracted. Thus, positional deviation
of the specimen is corrected.