A flood gun 10 for charge neutralization of an analysis region R.sub.a of
a sample S downstream of the flood gun, comprising: a first source 30 of
electrons; a second source 50 of positively charged particles; and an
extraction and focusing assembly 60,64, arranged to: (i) extract a first,
electron beam from the first source and focus the first beam to a first
flood area A.sub.e at the analysis region; and (ii) extract a second,
positive particle beam from the second source and focus the second beam
to a second flood area A.sub.i at the analysis region. The electron beam
and the positive particle beam may both be extracted and focused
simultaneously, in a single mode of operation or, alternately, in a dual
mode of operation. A corresponding method of providing charge
neutralization and a spectroscopic system for secondary particle emission
analysis are disclosed.