There is provided a scanning probe microscope capable of simply and
accurately confirming whether or not a sample shape satisfies specified
conditions. A pseudo reference image Sref1 comprises a pair of reference
line profiles Lref1 and Lref2 arranged apart form each other in parallel.
An operator moves and rotates the position of the pseudo reference image
Sref1 on a screen so that a sample shape line profile fits between the
reference line profiles Lref1 and Lref2 of the pseudo reference image
Sref1. If it is possible to fit the line profile of the sample shape
between the reference line profiles Lref1 and Lref2, it is determined
that the sample shape is in spec, while if it is not possible to fit the
line profile of the sample shape between the reference line profiles
Lref1 and Lref2, no matter how the pseudo reference image Sref1 is moved
and rotated, it is determined that the sample shape is out of spec.