A method for determining physical properties of micromachined cantilevers
used in cantilever-based instruments, including atomic force microscopes,
molecular force probe instruments and chemical or biological sensing
probes. The properties that may be so determined include optical lever
sensitivity, cantilever spring constant and cantilever-sample separation.
Cantilevers characterized with the method may be used to determine fluid
flow rates. The method is based on measurements of cantilever deflection
resulting from drag force as the cantilever is moved through fluid.
Unlike other methods for determining such physical properties of
cantilevers, the method described does not depend on cantilever contact
with a well-defined rigid surface. Consequently, the method may be
employed in situations where such contact is undesirable or inconvenient.
The method has numerous applications, including molecular force
measurements, atomic force microscopy and manipulation technology,
chemical or biological sensing, [lithographic manufacturing, nanometer
scale surface profiling] and other aspects of nanotechnology.