There is disclosed a piezoelectric/electrostrictive film device which has
a flexural displacement and durability equal to or more than those of a
related-art piezoelectric/electrostrictive film device and which has a
remarkably high resonance frequency and which is superior in high-speed
response. The piezoelectric/electrostrictive film device comprises: a
substrate formed of ceramic; and a piezoelectric/electrostrictive
operation portion including a lower electrode,
piezoelectric/electrostrictive layer, and upper electrode which are
successively stacked on the substrate and including a projecting end of
the piezoelectric/electrostrictive layer with which an upper surface of
the lower electrode and a lower surface of the upper electrode are
coated, and a projecting portion of the piezoelectric/electrostrictive
layer is a coupling member constituted of a hybrid material in which
inorganic particles are scattered in a matrix of a polymer compound, and
is coupled to the substrate.