An inductor formed within an integrated circuit and a method for forming
the inductor. The inductor comprises an underlying layer of aluminum
formed in a first metallization layer and patterned and etched into the
desired shape. In one embodiment the aluminum line comprises a spiral
shape. According to a damascene process, a conductive runner, preferably
of copper, is formed in a dielectric layer overlying the aluminum line
and in electrical contact therewith. The aluminum line and the conductive
runner cooperate to form the inductor. In another embodiment the aluminum
line and the conductive runner are formed in a vertically spaced-apart
orientation, with tungsten plugs or conductive vias formed to provide
electrical connection therebetween. A method for forming the inductor
comprises forming an aluminum conductive line and forming a conductive
runner over the conductive line.