Provided is a method for manufacturing a fixed abrasive material suitable
for use in CMP planarization pads from an aqueous polymer dispersion that
also includes abrasive particles that involves frothing the polymer
dispersion, applying the froth to a substrate, mold or carrier and curing
the froth to form a fixed abrasive material having an open cell structure
containing between about 5 and 85 wt % abrasive particles and a dry
density of about 350 kg/m.sup.3 to 1200 kg/m.sup.3.