There is provided a positive photoresist composition for use in a method
of forming a resist pattern that includes an immersion lithography step,
which exhibits little line edge roughness and an excellent resist pattern
profile. This photoresist composition includes a resin component (A), an
acid generator component (B), an organic solvent (C), and a
nitrogen-containing organic compound (D) represented by a general formula
(1) shown below: [wherein, X, Y, and Z each represent, independently, an
alkyl group that may contain an aryl group bonded to a terminal (although
two terminals from the groups X, Y, and Z may also be bonded together to
form a cyclic structure), at least one of X, Y, and Z contains a polar
group, and the molecular weight of the compound (D) is at least 200].