The present disclosure relates to an organic anti-reflective coating
composition and a method for forming photoresist patterns using the same.
The anti-reflective coating compositions are useful for preventing
reflection of a lower film layer or a substrate of a photoresist film,
reducing standing waves caused by light and variations in the thickness
of the photoresist itself, and increasing the uniformity of the
photoresist patterns. More particularly, the present invention relates to
an organic anti-reflective coating composition comprising particular
organo-silicon based polymers and a method for forming photoresist
patterns using the same. The organic anti-reflective coating composition
can prevent excessive absorbency of an anti-reflective film formed
therefrom and, thus, minimize the reflectivity of the film so that it can
efficiently remove standing waves and increase the uniformity of the
photoresist pattern.