Nitrogen trifluoride is produced with a high yield by the method
comprising forming a fast stream of micro droplets of a fused ammonium
fluoride salt by rapidly ejecting the fused ammonium fluoride salt into a
reactor through a nozzle while circulating the fused ammonium fluoride
salt in the reactor from a lower portion to an upper portion; and
contacting micro droplets of the fused ammonium fluoride salt with
fluorine gas sucked in the reactor through a suction pipe for fluorine by
a negative pressure formed around the nozzle due to an ejection of the
fused ammonium fluoride salt, whereby excessive generation and regional
accumulation of the heat of reaction are prevented, reducing the reaction
temperature by 10.about.30.degree. C. compared with those of the existing
methods, and a side reaction occurs only to a slight extent according to
the lowered reaction temperature.