The invention includes methods of forming patterned reticles. Design
features can be introduced into a layout for a reticle prior to optical
proximity correction, and then removed prior to taping a pattern onto the
reticle. Design features can alternatively, or additionally, be
introduced after optical proximity correction and asymmetrically relative
to one or more parts of a reticle pattern. The introduced features can
subsequently be taped to the reticle as part of the formation of the
patterned reticle.