The present invention relates to a metal oxide powder for high precision polishing and prepartion thereof, comprising aggregates formed by cohesion of primary particles, which has a cohesive degree (.alpha.) of 1.1 to 2.0 and a cohesive scale (.beta.) of 3 to 10, the cohesive degree (.alpha.) and the cohesive scale (.beta.) being defined by formula (I) and formula (II), respectively: .alpha.=6/(S.times..rho..times.d(XRD)) (I) .beta.=weight average particle diameter/d(XRD) (II)wherein, S is the specific surface area of the powder; .rho., the density; and d(XRD), the particle diameter of the powder determined by X-ray diffraction analysis. In accordance with the present invention, it is possible to provide a high polishing speed and reduce scratches.