A first-in-first-out (FIFO) microelectromechanical memory apparatus (also
termed a mechanical memory) is disclosed. The mechanical memory utilizes
a plurality of memory cells, with each memory cell having a beam which
can be bowed in either of two directions of curvature to indicate two
different logic states for that memory cell. The memory cells can be
arranged around a wheel which operates as a clocking actuator to serially
shift data from one memory cell to the next. The mechanical memory can be
formed using conventional surface micromachining, and can be formed as
either a nonvolatile memory or as a volatile memory.