A pattern forming material contains a block copolymer or graft copolymer
and forms a structure having micro polymer phases, in which, with respect
to at least two polymer chains among polymer chains constituting the
block copolymer or graft copolymer, the ratio between N/(Nc-No) values of
monomer units constituting respective polymer chains is 1.4 or more,
where N represents total number of atoms in the monomer unit, Nc
represents the number of carbon atoms in the monomer unit, No represents
the number of oxygen atoms in the monomer unit.