A plating apparatus continuously plates a surface of a substrate with
metal and performs its supplementary process in one housing unit. The
plating apparatus comprises a cassette stage for placing a substrate
cassette thereon, a pre-treatment unit for pre-treating a surface of a
substrate, and a plating unit for plating a surface of the substrate
pre-treated in the pre-treatment unit. The plating apparatus further
comprises a first substrate stage disposed between the cassette stage and
the pre-treatment unit, a cleaning and drying unit disposed between the
cassette stage and the first substrate stage, a first transfer device,
and a second transfer device. The first transfer device transfers a
substrate between the substrate cassette, the cleaning and drying unit,
and the first substrate stage. The second transfer device transfers a
substrate between the first substrate stage, the pre-treatment unit, and
the plating unit.