An amplifier GaAs MMIC for microwave band applications includes a ground
electrode 8 having a via hole group 12 composed of three via holes 11
filled with plated metals 10a that are formed adjacently. The interaction
thereby generates high frequency electromagnetic bonding, which reduces
the ground inductance. According to the MMIC, the ground inductance of
the via hole may be reduced while decrease of a strength and increase of
a size being restrained.