A method and a system for calibrating the work function of a non-contact
voltage sensor are provided. The method includes preparing a reference
sample to have a stable work function, measuring a voltage of the sample
using a non-contact voltage sensor, and determining a work function
correction factor of the sensor from the measured voltage. In turn, the
calibrated work function may be used to adjust voltages of substrates
measured by the sensor. A corona gun which includes a first electrode and
one or more conductive rods is provided. In some embodiments, the
conductive rods may be angled between 0 and 90 degrees with respect to a
first electrode sidewall and/or be concentrically arranged less than 90
degrees from each other. In addition or alternatively, the corona gun may
be adapted to alter its length and/or include a second electrode
partially inset within a space surrounded by the first electrode.