A sweeping linear magnetron is described. The magnetron has a cathode
backing plate, a drive housing attached to the cathode backing plate and
a motor held in the drive housing. The motor drives a yoke positioned
within a cut-out in the backing plate. The yoke has a magnet pack
attached thereto said yoke such that the magnet pack is adapted to being
moved over a target material and wherein the target material is being
sputtered within a vacuum chamber onto a substrate.