Electro-mechanical switches and memory cells using vertically-disposed
nanofabric articles and methods of making the same are described. An
electro-mechanical device, includes a structure having a major horizontal
surface and a channel formed therein. A conductive trace is in the
channel; and a nanotube article vertically suspended in the channel, in
spaced relation to a vertical wall of the channel. The article is
electro-mechanically deflectable in a horizontal direction toward the
conductive trace. Under certain embodiments, the vertically suspended
extent of the nanotube article is defined by a thin film process. Under
certain embodiments, the vertically suspended extent of the nanotube
article is about 50 nanometers or less. Under certain embodiments, the
nanotube article is clamped with a conducting material disposed in porous
spaces between some nanotubes of the nanotube article. Under certain
embodiments, the nanotube article is formed from a porous nanofabric.
Under certain embodiments, the nanotube article is electromechanically
deflectable into contact with the conductive trace and the contact is
either a volatile state or non-volatile state depending on the device
construction. Under certain embodiments, the vertically oriented device
is arranged into various forms of three-trace devices. Under certain
embodiments, the channel may be used for multiple independent devices, or
for devices that share a common electrode.