Novel structures of the photodetector having broad spectral ranges
detection capability (from UV to 1700 nm (and also 2500 nm)) are
provided. The photodetector can offer high quantum efficiency >95%
over wide spectral ranges, high frequency response >8.5 GHz. The
photodiode array of N.times.N elements is also provided. The array can
also offer wide spectral detection ranges (UV to 1700 nm/2500 nm) with
high quantum efficiency >85% and high quantum efficiency of >8.5
GHz, cross-talk of <1%. In the array, each photodiode can be
independently addressable. The photodetector element consists of the
substrate, buffer layer, absorption layer, contact layer, and the
illumination surface with thin contact layer. The illumination surface
can be circular, square, rectangular or ellipsometrical in shape. The
photodiode array consists of the photodiode elements of N.times.N, where
each element can be independently addressable. The sensor can be
fabricated as top-illuminated type or bottom-illuminated type. The
photodiode and its array provided in this invention, could be used in
multiple purpose applications such as telecommunication, imaging (where
CCD and CMOS sensor cannot be used), and also many sensing applications
including surveillance, satellite tracking, advanced lidar systems, etc.
The most important advantage of this photodiode is that the performance
will not be degraded under wide range of temperature variation, which
eliminates the use of the temperature controller. Other advantage of this
invention is that conventional fabrication technology can be used to
fabricate the single photodiode or its array herein described.