A complementary metal-oxide-semiconductor field effect transistor
structure includes ion implants in only one of the two complementary
devices. The transistor structure generally includes a compound
semiconductor substrate and an epitaxial layer structure that includes
one or more donor layers that establish a conductivity type for the
epitaxial layer structure. The ion implants function to "invert" or
"reverse" the conductivity type of the epitaxial layer structure in one
of the complementary devices. In the example embodiment, p-type acceptor
implants are utilized in the p-channel device, while the n-channel device
remains implant-free.