This invention enables high-resolution, high-precision motion control at
low cost. A novel flexure-beam motion-reducing actuator is incorporated
into an XYO positioning stage to enable rigidly stable positioning of any
object with sub-10-nanometer linear-positioning precision and
sub-0.1-microradian rotary-positioning precision. The actuator's output
element moves in the same direction as its input element. A single
actuator enhances the resolution and precision of any motion-control
drive mechanism by a factor as much as 50 or more, and a cascaded pair of
actuators provide enhancement factors greater than 1000. In one
embodiment, the enhancement factor is adjustable manually. The actuator
and stage are useful for optical, lithographic and scanning probe
applications.