Provided are a composition for forming porous film which can form a porous
film having practical mechanical strength in a simple and low cost
process; a porous film and a method for forming the film; and an
inexpensive, high-performing and highly reliable semiconductor device
comprising the porous film inside. More specifically, provided is a
composition for forming porous film, comprising a polymer which is
obtainable by hydrolyzing and condensing one or more silane compounds
represented by Formula (1), or preferably by hydrolyzing and
co-condensing one or more silane compounds represented by Formula (1) and
one more silane compounds represented by Formula (2), Formulas (1) and
(2) being: (R.sup.1).sub.aSi(R.sup.2).sub.4-a (1)
(R.sup.3).sub.bSi(R.sup.4).sub.4-b (2) Also provided is a method for
forming porous film comprising a step of applying said composition on a
substrate to form film and a step of transforming the film into porous
film.