A substrate transport apparatus includes a first substrate transport
robot, a second substrate transport robot and a substrate transfer
mechanism. The first substrate transport robot includes an upper hand and
a lower hand vertically arranged. The second substrate transport robot
includes an upper hand and a lower hand vertically arranged. The
substrate transfer mechanism includes an upper hand and a lower hand
vertically arranged and a hand driving mechanism adapted to perform hand
opening and closing operations to vertically move the upper and lower
hands.