An assembly method of assembling a substrate transfer device including: a
transfer system unit forming step of fixing a robot and a substrate
container retainer to a divided body which composes a part of the
substrate transfer device and is formed separably on a main structural
body as a residual part of the substrate transfer device, thereby forming
a transfer system unit; an operation examination step of examining
whether the robot fixed to the transfer system unit can operate as a part
of the substrate transfer device or not; and a mounting step of mounting
the transfer system unit on the main structural body of the substrate
transfer device after the operation examination step.