The present invention provides a positive resist composition comprising a
resin which itself is insoluble or poorly soluble in an alkali aqueous
solution but becomes soluble in an alkali aqueous solution by the action
of an acid, an acid generator, and multifunctional epoxy compound,
wherein the content of halogen atoms in the resin is 40% by weight or
more, at least one of structural units constituting the resin is a
structural unit having an alicyclic hydrocarbon skeleton, and the
structural unit having an alicyclic hydrocarbon skeleton contains therein
at least one group rendering the resin soluble in an alkali aqueous
solution by the action of an acid, and at least one halogen atom.