A drive circuit and relay circuit using this drive circuit are provided, the drive circuit including: a first terminal connected to a drive electrode located at one side of a mechanical switch contact driven by static electricity; a second terminal connected to a drive electrode located at the other side of the switch contact; a photoelectromotive force element connected to the first terminal and the second terminal, optically coupled to a light emitting element, and including at least two photodiode arrays which are serially connected; and an electronic inductor circuit (bypass circuit) connected in parallel with at least one of the photodiode arrays in the photoelectromotive force element.

 
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> Non-contact heater and method for non-contact heating of a substrate for material deposition

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