An improved transistor structure that decreases source/drain (S/D)
resistance without increasing gate-to-S/D capacitance, thereby increasing
device operation. S/D structures are formed into recesses formed on a
semiconductor wafer through a semiconductor layer and a first layer of a
buried insulator having at least two layers. A body is formed from the
semiconductor layer situated between the recesses, and the body comprises
a top body surface and a bottom body surface that define a body
thickness. Top portions of the S/D structures are within and abut the
body thickness. An improved method for forming the improved transistor
structure is also described and comprises: forming recesses through a
semiconductor layer and a first layer of a buried insulator so that a
body is situated between the recesses; and forming S/D structures into
the recesses so that top portions of the S/D structures are within and
abut a body thickness.