A nonvolatile semiconductor memory apparatus suitable to logic
incorporation, by which a charge injection efficiency is high and hot
electrons (HE) can be effectively injected at a low voltage is provided.
A memory transistor (M) comprises first and second source/drain regions
(S, SSL, D, SBL) formed on a semiconductor substrate (SUB, W), a charge
storage film (GD) having a charge storage faculty and a gate electrode
(WL). Memory peripheral circuits (2a to 9) generate a first voltage (Vd)
and a second voltage (Vg-Vwell), apply the first voltage (Vd) to the
second source/drain region (D, SBL) by using potential (0V) of the first
source/drain region (S, SSL) as reference, apply the second voltage
(Vg-Vwell) to the gate electrode (WL), generate hot electrons (HE) by
ionization collision on the second source/drain region (D, SBL) side, and
inject the hot electrons (HE) to the charge storage film (GD) from the
second source/drain region (D, SBL) side at the time of writing data.