A switching element includes a first electrode 1 and a second electrode 2 provided apart from each other so as to run a discharge current between them, and a third electrode 3 configured to be capable of changing the difference in potential from at least one of the first and second electrodes 1 and 2, and of controlling the magnitude of the discharge current running between the first and second electrodes 1 and 2 by changing this potential difference.

 
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> Controller and method to mediate data collection from smart sensors for fab applications

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