A lithographic apparatus including an illumination system configured to
condition a radiation beam is described. The illumination system includes
radiation beam uniformity adjuster for adjusting the uniformity of the
radiation beam using segments that are at least partly arranged in the
radiation beam and that are mounted on a frame by a torsion bar. The
device further includes an actuator configured to rotate the segment in
order to change the amount of radiation of the radiation beam that is
blocked. The device also includes a first magnetic member mounted on the
torsion bar configured to co-operate with a second magnetic member
mounted on the frame for generating a position dependent torque about the
longitudinal axis that is configured to at least partly compensate a
torque exerted on the segment by the torsion bar.