A MEMS device achieves a large angle of rotation of a plate about 2
independent axes by employing a handle portion of the plate which is
isolated by respective springs coupling the handle portion to each of two
actuators. A first actuator, which rotates the mirror about the same axis
as done in U.S. Pat. No. 6,781,744 is essentially the same structure
disclosed therein, but with the mirror plate thereof shrunken in size.
This shrunken plate is coupled by a spring to the mirror plate of the
instant invention. Movement of the shrunken plate causes corresponding
movement of the handle portion, and hence the mirror. A second actuator,
coupled by another spring to the mirror plate of the instant invention,
rotates about a second axis that is perpendicular to the first axis and
parallel to the substrate. The second actuator includes an actuator plate
and an electrode thereunder.