A method and apparatus for eliminating artifacts in images formed using more than one image segment. A buffer region associated with two adjacent image segments is defined wherein the intensity levels of the pixels are attenuated. When image segments substantially overlap in the buffer region, the intensity in the buffer region substantially sums to full scale. The intensity of the pixels in the buffer region is preferably attenuated using a device to modulate the intensity of the source of radiation.

 
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> Spatial light modulator, lithographic apparatus and device manufacturing method

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