An inter-vane platform, for a vane support disk of a turbine engine fan, includes a central part of one piece with the support disk between two adjacent vanes, and two lateral parts, forming extensions to two lateral edges of the central part, and each designed in such a way as to deflect under the impact of the vane opposite which the lateral part is located.

 
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> Apparatus and method for depositing and planarizing thin films of semiconductor wafers

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