A jointing holder for an optical module for single-fiber bidirectional communication comprises a unitarily structured cylindrical body that has the following portions: (a) an optical fiber-fixing portion for securely holding an optical fiber for transmitting multiwavelength light bidirectionally, (b) a semiconductor laser-fixing portion for securely holding a semiconductor laser for emitting outgoing light .lamda.1, (c) a photodiode-fixing portion for securely holding a photodiode for receiving incoming light .lamda.2, (d) an optical path-forming space for optically coupling the optical fiber, the semiconductor laser, and the photodiode, and (e) in the optical path-forming space, an optical filter-fixing face for securely holding an optical filter for separating multiplexed wavelengths. The jointing holder enables the optical module to reduce the number of components, to be miniaturized, and to reduce the dimensional deviation at the time of the assembly, enabling high-precision assembly. An optical module for single-fiber bidirectional communication incorporates the jointing holder.

 
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> Scanning exposure apparatus, manufacturing method thereof, and device manufacturing method

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