There are provided a cantilever array having a simple structure and being
able to reliably detect a surface of a sample, a method for fabricating
the same, a scanning probe microscope, a sliding apparatus of a guiding
and rotating mechanism, a sensor, a homodyne laser interferometer, a
laser Doppler interferometer having an optically exciting function for
exciting a sample, each using the same, and a method for exciting
cantilevers.The cantilever array includes a large number of compliant
cantilevers (3) sliding on a surface (2) of a sample (1).