Provided is a tantalum sputtering target having a crystal structure in
which the (222) orientation is preferential from a position of 10% of the
target thickness toward the center face of the target, and a
manufacturing method of a tantalum sputtering target, including the steps
of forging and recrystallization annealing, and thereafter rolling, a
tantalum ingot or billet having been subject to melting and casting, and
forming a crystal structure in which the (222) orientation is
preferential from a position of 10% of the target thickness toward the
center face of the target. As a result, evenness (uniformity) of the film
is enhanced, and quality of the sputter deposition is improved.