Single-crystal devices and a method for forming semiconductor film
single-crystal domains are provided. The method comprises: forming a
substrate, such as glass or Si; forming an insulator film overlying the
substrate; forming a single-crystal seed overlying the substrate and
insulator; forming an amorphous film overlying the seed; annealing the
amorphous film; and, forming a single-crystal domain in the film
responsive to the single-crystal seed. The annealing technique can be
(conventional) laser annealing, a laser induced lateral growth (LiLAC)
process, or conventional furnace annealing. In some aspects, forming a
single-crystal seed includes forming a nanowire or a self assembled
monolayer (SAM). For example, a Si nanowire can be formed having a
crystallographic orientation of <110> or <100>. When, the
seed has a <100> crystallographic orientation, then an n-type TFT
can be formed. Likewise, when a single-crystal seed has a <110>
crystallographic orientation, a p-type TFT can be formed.