Micro-optical elements (MOEs) are designed and fabricated onto transparent laser driver substrates to collimate or focus the beams from vertical-cavity surface-emitting lasers (VCSELs) in accordance with specific application requirements. One disclosed example teaches the hybrid integration of a top-emitting 850 mm VCSEL array and a transparent sapphire substrate that supports a monolithic MOE with designated optical functionality. A flip-chipping hybridization technique ensures a realistic and reliable process. The VCSEL beams transmit directly through the MOE structure on the transparent sapphire substrate and become well-controlled optical outputs under precise specifications. The optical power loss in such a beam shaping process is minimized compared to configurations based on conventional optical components.