A first plurality of memory cells is formed on pillars in a first column
of the array. A second plurality of memory cells is formed in a first set
of trenches in the same column. The second plurality of memory cells is
coupled to the first plurality of memory cells through a series
connection of their source/drain regions. A second set of trenches,
perpendicular to the first set, is formed to separate columns of the
array. Wordlines are formed along rows of the array. The wordlines are
formed into the second set of trenches in order to shield adjacent
floating gates. Metal shields are formed in the first set of trenches
along the rows and between floating gates on the pillars.